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| 15kv | 20kv | 30kv | Semi-HiPressure | Hipressure |
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DN40CF mounting flange |
DN40CF mounting flange |
DN40CF mounting flange |
add-on for 15/20/30 REG
RHEED Guns
|
add-on for 15/20/30 REG
RHEED Guns
|
|
340 μA max current (up to 1mA on request) |
250 μA max current (up to 1mA on request) |
170 μA max current (up to 1mA on request) |
DN40CF mounting flange |
DN40CF mounting flange |
|
242 mm length |
242 mm length |
318 mm length |
factor 1000 pressure reduction |
factor 200.000 pressure reduction |
|
up to 15 kV energy |
up to 20 kV energy |
up to 30 kV energy |
Beam alignment aperture |
Beam alignment aperture |
| more info | more info | more info | more info | more info |
RHEED System 15 kV - REG15
Technical Data:
RHEED System 20 kV - REG20
Technical Data:
RHEED System 30 kV - REG30
Technical Data:
Semi-HiPressure add-on for 15/20/30 REG RHEED Guns
Technical Data:
HiPressure add-on for 15/20/30 REG RHEED Guns
Technical Data:
|
Pressure reduction through dual differential pumping |
Factor 200.000 |
|
Stable emission with add-on at chamber pressure |
5x10-2 mBar |
|
Beam alignment through aperture in phosphor coated disk |
|
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Deflection |
magnetic X-Y Beam Rocking |
|
Mounting Flange |
DN40CF |
|
Bakeout Temp. |
200°C |
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